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The effects of sputtering powers on the structural, optical and electrical properties of
β
-Ga
2
O
3
thin films prepared by magnetron sputtering |
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Title: |
The effects of sputtering powers on the structural, optical and electrical properties of
β
-Ga
2
O
3
thin films prepared by magnetron sputtering |
Author: |
Ji, Feng Chen, Zhichao Li, Yadan Wang, Yahan Ge, Xuehao Jiang, Kai Zhu, Hai Wang, Xianghu |
Appeared in: |
Physica. B, Condensed matter |
Paging: |
Volume 713 () nr. C pages p. |
Year: |
2025 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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